Porous alumina ceramics
Porous alumina ceramics are ceramics with countless pores or "holes" inside. As porous material has low thermal conductivity and is lightweight, it is used for filters, bubblers, vacuum chucks, air blowing, and more. Thera are two kinds of porous ceramics we have - Alumina and SiC. We will select the best material that suites your application.
Porous Alumina Ceramics
This is a type of porous ceramics consisted of Al2O3. Porous Alumina Ceramics are well-balanced in the thermal and mechanical properties. Its weight is almost the half of the solid Alumina. It can be safely used in the temperature range of 600 to 1600 degree Celcius. We have 5 grades, depending on its air permeability and color.
Porous SiC Ceramics
This is a type of porous ceramics consisted of SiO2. Porous SiC Ceramics are available in the application exposed to rapid thermal change via heating & cooling, acid chemicals and pressure from heavy load, etc., all of which Alumina version cannot cope with.
Its weight is almost the half of the solid Alumina and it can be safely used in the temperature range of 1400 to 1600 degree Celcius. It is hard to be bent and easy to disperse heat. We have 2 grades, depending on its air permeability.
Characteristics
-
Porous ceramics allow liquids and gas to pass through.
-
Porous ceramics are lighter than metal and the lightest among ceramics.
-
Porous ceramics can be shaped precisely enough to be fit into a housing with no gap.
-
Porous ceramics can levitate fine electronic components by air blow.
-
Porous ceramics can grip wafers partially regardless of the wafer size.
-
Porous ceramics do not hurt the work because the surface is clean and smooth, which is possible in porous ceramic only.
Application:
- Vacuum chuck table / Suction pads for wafer hands
- Weight reduction of components. (Porous ceramics are lighter than aluminium.)
- Heat insulation plate (Alumina) / Heat sink (SiC)
- Plate and setter for kiln/furnace
- Gas filter
- A component that prevents film detachment in CVD/PVD equipment.
- To levitate wafers by air blowing to avoid contamination
- Deodorant, Dust collection, Filtration, Water purification
- Low dielectric components
Property Chart - Porous Alumina and Porous SiC
| Item |
Unit |
Alumina |
SiC |
| ZG50 |
ZG60 |
ZG60B |
ZG40 |
ZGP40 |
ZGP60 |
ZGS40 |
ZGS60 |
| Porosity |
% |
50 |
60 |
73 |
40 |
35 |
60 |
40 |
60 |
| Pore diameter |
μm |
5〜40 |
5〜40 |
5〜40 |
50〜100 |
50～200 |
20～40 |
5～30 |
10～30 |
| Bulk density |
g/cm3 |
1.82 |
1.57 |
1.04 |
2.56 |
2.48 |
1.54 |
1.9 |
1.32 |
| Air Penetration rate |
(×10-13m2) |
0.8 |
5.73 |
- |
100 |
270 |
200 |
6.1 |
160 |
| Purity |
% |
96 |
96 |
- |
95 |
90 |
|
98 |
|
| Flexual strength |
MPa |
60 |
35 |
30 |
76 |
22 |
28 |
80 |
4 |
| Dielectric constant |
1MHz |
- |
- |
- |
4.1 |
- |
3.8 |
- |
35.8 |
| Thermal conductivity |
W/(m・K) |
- |
- |
- |
3 |
5 |
13.4 |
70 |
70.4 |
| Thermal expansion coefficient |
×10-6 |
- |
- |
- |
7.6 |
7.6 |
8 |
4.4 |
4.4 |
| (RT-800℃) |
(RT-700℃) |
| Color |
- |
White |
White |
Black |
White |
Black |
White |
Glay |
Black |
| Application |
Light-reducible |
○ |
○ |
○ |
× |
○ |
○ |
× |
○ |
| Heat insulation |
○ |
○ |
○ |
× |
○ |
× |
× |
× |
| Vacuum Chuck |
× |
○ |
○ |
○ |
○ |
○ |
○ |
○ |
| Filter, Rectification (Air/Fluid), Spraying |
× |
○ |
○ |
○ |
○ |
○ |
○ |
○ |
| Suited application |
Light, Heat insulation |
Fine surface, Able to grip films and thin wafers. |
Suitable for image processing and anti-reflection. |
Large pores with relatively good penetration rate. |
Suitable for image processing and anti-reflection. |
Smaller pores and higher penetgration rate than AZP60. |
Owning AZP60 properties plus more strength. Partial gripping possible. |
Suitable for setter plates that can prevent reaction between setters and works. |
Product Tags:
|
|
Porous alumina ceramics, Porous silicon carbide ceramics Images
|
